Modification of tribological performance of DLC films by means of some elements addition

The elements added diamond-like carbon films (hydrogen, fluorine, and sulfur) fabricated from C 2H 2:H 2, C 2H 2:CF 4 and C 2H 2:SF 6 mixtures were used to compare and study the effects of element contents on the deposition and tribological properties of films prepared by plasma-based ion implantati...

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Veröffentlicht in:	Diamond and related materials 2010-05, Vol.19 (5), p.525-529
Hauptverfasser:	Moolsradoo, Nutthanun, Watanabe, Shuichi
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Contact angle Cross-disciplinary physics: materials science rheology Diamond-like carbon Elements addition Exact sciences and technology Fluorine Friction Fullerenes and related materials diamonds, graphite Hardness Materials science Mechanical and acoustical properties Nanostructure Physical properties of thin films, nonelectronic Physics Physics of gases, plasmas and electric discharges Physics of plasmas and electric discharges Plasma applications Plasma-based ion implantation (PBII) Plasma-based ion implantation and deposition Specific materials Sulfur Surface energy Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Tribological properties Tribology
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