Modification of tribological performance of DLC films by means of some elements addition

The elements added diamond-like carbon films (hydrogen, fluorine, and sulfur) fabricated from C 2H 2:H 2, C 2H 2:CF 4 and C 2H 2:SF 6 mixtures were used to compare and study the effects of element contents on the deposition and tribological properties of films prepared by plasma-based ion implantati...

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Veröffentlicht in:Diamond and related materials 2010-05, Vol.19 (5), p.525-529
Hauptverfasser: Moolsradoo, Nutthanun, Watanabe, Shuichi
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container_issue 5
container_start_page 525
container_title Diamond and related materials
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creator Moolsradoo, Nutthanun
Watanabe, Shuichi
description The elements added diamond-like carbon films (hydrogen, fluorine, and sulfur) fabricated from C 2H 2:H 2, C 2H 2:CF 4 and C 2H 2:SF 6 mixtures were used to compare and study the effects of element contents on the deposition and tribological properties of films prepared by plasma-based ion implantation (PBII). The structure of the films was analyzed by Raman spectroscopy. Hardness and elastic modulus of films were measured by nano-indentation hardness testing. Contact angle and surface energy of films were measured by contact angle measurement. Tribological characteristics of films were performed using a ball-on-disk friction tester. The results indicate that with the increasing element contents, the hardness and elastic modulus, and surface energy of all films decreases, while the surface angle tends to increase. Additionally, H-DLC films at C:H flow rate ratio of 1:4 shows a friction coefficient of 0.08 under ambient air, which are considerable improvement in the tribological properties. This is due to the formation of a transfer films on the interface and high hydrogen contents. For F-DLC films and S-DLC films, does not show a significant decrease in the friction coefficient with the fluorine and sulfur contents under ambient air. The decrease in the friction coefficient is greater under high vacuum than under ambient air.
doi_str_mv 10.1016/j.diamond.2010.01.010
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subjects Condensed matter: structure, mechanical and thermal properties
Contact angle
Cross-disciplinary physics: materials science
rheology
Diamond-like carbon
Elements addition
Exact sciences and technology
Fluorine
Friction
Fullerenes and related materials
diamonds, graphite
Hardness
Materials science
Mechanical and acoustical properties
Nanostructure
Physical properties of thin films, nonelectronic
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Plasma applications
Plasma-based ion implantation (PBII)
Plasma-based ion implantation and deposition
Specific materials
Sulfur
Surface energy
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Tribological properties
Tribology
title Modification of tribological performance of DLC films by means of some elements addition
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