Cross-sectional hydrogen content and mass density profiles of diamond-like carbon film by neutron and X-ray reflectivity
The cross-sectional profiles of hydrogen content and mass density of diamond-like carbon (DLC) film were investigated using X-ray and neutron reflectivity. DLC films were prepared using a plasma CVD technique by varying the H 2/(H 2 + CH 4) ratio gas source from 0 to 0.9. The cross-sectional hydroge...
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| Veröffentlicht in: | Diamond and related materials 2010-05, Vol.19 (5), p.489-491 |
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| container_title | Diamond and related materials |
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| creator | Ozeki, K. Saitoh, H. Takeda, M. Ohgoe, Y. Hirakuri, K.K. Yonemura, M. Masuzawa, T. |
| description | The cross-sectional profiles of hydrogen content and mass density of diamond-like carbon (DLC) film were investigated using X-ray and neutron reflectivity. DLC films were prepared using a plasma CVD technique by varying the H
2/(H
2
+
CH
4) ratio gas source from 0 to 0.9. The cross-sectional hydrogen content and mass density profiles of the films were calculated by neutron and X-ray reflectivity, and the results were compared with those from elastic recoil detection analysis (ERDA).
The fitted simulation showed that the mass density gradually decreased with increasing depth, whereas the hydrogen content increased with depth. In both ERDA and reflectivity measurements, the average hydrogen content was more than 30% in all films and tended to increase with the H
2/(CH
4
+
H
2) ratio. However, there was a difference in hydrogen content values between the two analyses ranging from 5.1
% to 8.5%. |
| doi_str_mv | 10.1016/j.diamond.2009.09.017 |
| format | Article |
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2/(H
2
+
CH
4) ratio gas source from 0 to 0.9. The cross-sectional hydrogen content and mass density profiles of the films were calculated by neutron and X-ray reflectivity, and the results were compared with those from elastic recoil detection analysis (ERDA).
The fitted simulation showed that the mass density gradually decreased with increasing depth, whereas the hydrogen content increased with depth. In both ERDA and reflectivity measurements, the average hydrogen content was more than 30% in all films and tended to increase with the H
2/(CH
4
+
H
2) ratio. However, there was a difference in hydrogen content values between the two analyses ranging from 5.1
% to 8.5%.</description><identifier>ISSN: 0925-9635</identifier><identifier>EISSN: 1879-0062</identifier><identifier>DOI: 10.1016/j.diamond.2009.09.017</identifier><language>eng</language><publisher>Amsterdam: Elsevier B.V</publisher><subject>Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.) ; Cross sections ; Cross-disciplinary physics: materials science; rheology ; Density ; Diamond-like carbon films ; Exact sciences and technology ; Fullerenes and related materials; diamonds, graphite ; Hydrogen content ; Mass density ; Materials science ; Mathematical analysis ; Methods of deposition of films and coatings; film growth and epitaxy ; Neutron reflectivity ; Physics ; Recoil ; Reflectivity ; Simulation ; Specific materials ; X-ray reflectivity ; X-rays</subject><ispartof>Diamond and related materials, 2010-05, Vol.19 (5), p.489-491</ispartof><rights>2009 Elsevier B.V.</rights><rights>2015 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c371t-b25e55b4c3f46126a0296157e328249d1c245c251d9957d34831376a5089acdb3</citedby><cites>FETCH-LOGICAL-c371t-b25e55b4c3f46126a0296157e328249d1c245c251d9957d34831376a5089acdb3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://www.sciencedirect.com/science/article/pii/S0925963509002611$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>309,310,314,776,780,785,786,3537,23909,23910,25118,27901,27902,65306</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=22674883$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Ozeki, K.</creatorcontrib><creatorcontrib>Saitoh, H.</creatorcontrib><creatorcontrib>Takeda, M.</creatorcontrib><creatorcontrib>Ohgoe, Y.</creatorcontrib><creatorcontrib>Hirakuri, K.K.</creatorcontrib><creatorcontrib>Yonemura, M.</creatorcontrib><creatorcontrib>Masuzawa, T.</creatorcontrib><title>Cross-sectional hydrogen content and mass density profiles of diamond-like carbon film by neutron and X-ray reflectivity</title><title>Diamond and related materials</title><description>The cross-sectional profiles of hydrogen content and mass density of diamond-like carbon (DLC) film were investigated using X-ray and neutron reflectivity. DLC films were prepared using a plasma CVD technique by varying the H
2/(H
2
+
CH
4) ratio gas source from 0 to 0.9. The cross-sectional hydrogen content and mass density profiles of the films were calculated by neutron and X-ray reflectivity, and the results were compared with those from elastic recoil detection analysis (ERDA).
The fitted simulation showed that the mass density gradually decreased with increasing depth, whereas the hydrogen content increased with depth. In both ERDA and reflectivity measurements, the average hydrogen content was more than 30% in all films and tended to increase with the H
2/(CH
4
+
H
2) ratio. However, there was a difference in hydrogen content values between the two analyses ranging from 5.1
% to 8.5%.</description><subject>Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.)</subject><subject>Cross sections</subject><subject>Cross-disciplinary physics: materials science; rheology</subject><subject>Density</subject><subject>Diamond-like carbon films</subject><subject>Exact sciences and technology</subject><subject>Fullerenes and related materials; diamonds, graphite</subject><subject>Hydrogen content</subject><subject>Mass density</subject><subject>Materials science</subject><subject>Mathematical analysis</subject><subject>Methods of deposition of films and coatings; film growth and epitaxy</subject><subject>Neutron reflectivity</subject><subject>Physics</subject><subject>Recoil</subject><subject>Reflectivity</subject><subject>Simulation</subject><subject>Specific materials</subject><subject>X-ray reflectivity</subject><subject>X-rays</subject><issn>0925-9635</issn><issn>1879-0062</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2010</creationdate><recordtype>article</recordtype><recordid>eNqFUE1r3DAQFaGBbDf5CQFdSk_e6MOyrFMpS5sUFnppIDchS-NUW1vaSt4l_veV2aXXwMAwzJv33jyE7inZUEKbh_3GeTPG4DaMELVZisortKKtVBUhDfuAVkQxUamGixv0Mec9IZSpmq7Q2zbFnKsMdvIxmAH_nl2KrxCwjWGCMGETHB5NzthByH6a8SHF3g-QcezxRbga_B_A1qQuBlyWI-5mHOA4pTIvBC9VMjNO0A-L0KnQ3KLr3gwZ7i59jZ6_f_u1fap2Px9_bL_uKsslnaqOCRCiqy3v64ayxhCmGiokcNayWjlqWS0sE9QpJaTjdcspl40RpFXGuo6v0eczb7H99wh50qPPFobBBIjHrKXgslacsIIUZ6RdIile9SH50aRZU6KXoPVeX_7VS9B6KSrL3aeLgsnWDH0ywfr8_5ixRtZtywvuyxkH5d2Th6Sz9RAsOJ9KKtpF_47SP997l3M</recordid><startdate>20100501</startdate><enddate>20100501</enddate><creator>Ozeki, K.</creator><creator>Saitoh, H.</creator><creator>Takeda, M.</creator><creator>Ohgoe, Y.</creator><creator>Hirakuri, K.K.</creator><creator>Yonemura, M.</creator><creator>Masuzawa, T.</creator><general>Elsevier B.V</general><general>Elsevier</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SR</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope></search><sort><creationdate>20100501</creationdate><title>Cross-sectional hydrogen content and mass density profiles of diamond-like carbon film by neutron and X-ray reflectivity</title><author>Ozeki, K. ; Saitoh, H. ; Takeda, M. ; Ohgoe, Y. ; Hirakuri, K.K. ; Yonemura, M. ; Masuzawa, T.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c371t-b25e55b4c3f46126a0296157e328249d1c245c251d9957d34831376a5089acdb3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2010</creationdate><topic>Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.)</topic><topic>Cross sections</topic><topic>Cross-disciplinary physics: materials science; rheology</topic><topic>Density</topic><topic>Diamond-like carbon films</topic><topic>Exact sciences and technology</topic><topic>Fullerenes and related materials; diamonds, graphite</topic><topic>Hydrogen content</topic><topic>Mass density</topic><topic>Materials science</topic><topic>Mathematical analysis</topic><topic>Methods of deposition of films and coatings; film growth and epitaxy</topic><topic>Neutron reflectivity</topic><topic>Physics</topic><topic>Recoil</topic><topic>Reflectivity</topic><topic>Simulation</topic><topic>Specific materials</topic><topic>X-ray reflectivity</topic><topic>X-rays</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Ozeki, K.</creatorcontrib><creatorcontrib>Saitoh, H.</creatorcontrib><creatorcontrib>Takeda, M.</creatorcontrib><creatorcontrib>Ohgoe, Y.</creatorcontrib><creatorcontrib>Hirakuri, K.K.</creatorcontrib><creatorcontrib>Yonemura, M.</creatorcontrib><creatorcontrib>Masuzawa, T.</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Engineered Materials Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><jtitle>Diamond and related materials</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Ozeki, K.</au><au>Saitoh, H.</au><au>Takeda, M.</au><au>Ohgoe, Y.</au><au>Hirakuri, K.K.</au><au>Yonemura, M.</au><au>Masuzawa, T.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Cross-sectional hydrogen content and mass density profiles of diamond-like carbon film by neutron and X-ray reflectivity</atitle><jtitle>Diamond and related materials</jtitle><date>2010-05-01</date><risdate>2010</risdate><volume>19</volume><issue>5</issue><spage>489</spage><epage>491</epage><pages>489-491</pages><issn>0925-9635</issn><eissn>1879-0062</eissn><abstract>The cross-sectional profiles of hydrogen content and mass density of diamond-like carbon (DLC) film were investigated using X-ray and neutron reflectivity. DLC films were prepared using a plasma CVD technique by varying the H
2/(H
2
+
CH
4) ratio gas source from 0 to 0.9. The cross-sectional hydrogen content and mass density profiles of the films were calculated by neutron and X-ray reflectivity, and the results were compared with those from elastic recoil detection analysis (ERDA).
The fitted simulation showed that the mass density gradually decreased with increasing depth, whereas the hydrogen content increased with depth. In both ERDA and reflectivity measurements, the average hydrogen content was more than 30% in all films and tended to increase with the H
2/(CH
4
+
H
2) ratio. However, there was a difference in hydrogen content values between the two analyses ranging from 5.1
% to 8.5%.</abstract><cop>Amsterdam</cop><pub>Elsevier B.V</pub><doi>10.1016/j.diamond.2009.09.017</doi><tpages>3</tpages></addata></record> |
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| identifier | ISSN: 0925-9635 |
| ispartof | Diamond and related materials, 2010-05, Vol.19 (5), p.489-491 |
| issn | 0925-9635 1879-0062 |
| language | eng |
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| source | Elsevier ScienceDirect Journals |
| subjects | Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.) Cross sections Cross-disciplinary physics: materials science rheology Density Diamond-like carbon films Exact sciences and technology Fullerenes and related materials diamonds, graphite Hydrogen content Mass density Materials science Mathematical analysis Methods of deposition of films and coatings film growth and epitaxy Neutron reflectivity Physics Recoil Reflectivity Simulation Specific materials X-ray reflectivity X-rays |
| title | Cross-sectional hydrogen content and mass density profiles of diamond-like carbon film by neutron and X-ray reflectivity |
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