High-sensitivity and high-resolution low-energy ion scattering
Low-Energy Ion Scattering (LEIS or ISS) is used to selectively analyze the atomic composition of the outer atomic layer of surfaces. In addition, the spectrum gives (non-destructively) the in-depth distribution. Using a double toroidal energy analyzer with parallel energy detection and time-of-fligh...
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| Veröffentlicht in: | Vacuum 2010-03, Vol.84 (8), p.1005-1007 |
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| creator | Brongersma, Hidde H. Grehl, Thomas van Hal, Paul A. Kuijpers, Niels C.W. Mathijssen, Simon G.J. Schofield, Emma R. Smith, Richard A.P. ter Veen, Hendrik R.J. |
| description | Low-Energy Ion Scattering (LEIS or ISS) is used to selectively analyze the atomic composition of the outer atomic layer of surfaces. In addition, the spectrum gives (non-destructively) the in-depth distribution. Using a double toroidal energy analyzer with parallel energy detection and time-of-flight filtering a high sensitivity and mass resolution of LEIS is achieved. This is demonstrated for a highly dispersed catalyst of Pt/Au on γ-alumina. The improved depth resolution is illustrated for self-assembled monolayers of alkanethiols (12–20 carbon atoms) on gold. Even for these low Z carbon atoms a clear shift of 8
eV/carbon atom is observed (using 1.5
keV
4He
+ ion scattering). This opens many new possibilities for studies of ultra-thin diffusion barriers, high-k dielectrics and biosensors. |
| doi_str_mv | 10.1016/j.vacuum.2009.11.016 |
| format | Article |
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eV/carbon atom is observed (using 1.5
keV
4He
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eV/carbon atom is observed (using 1.5
keV
4He
+ ion scattering). This opens many new possibilities for studies of ultra-thin diffusion barriers, high-k dielectrics and biosensors.</description><subject>Carbon</subject><subject>Depth resolution</subject><subject>Diffusion barriers</subject><subject>Energy use</subject><subject>Filtering</subject><subject>Gold</subject><subject>High sensitivity</subject><subject>International Space Station</subject><subject>Ion scattering</subject><subject>LEIS</subject><subject>Low energy ion scattering</subject><subject>Mass resolution</subject><subject>Quantitative</subject><subject>Self-assembled monolayer</subject><issn>0042-207X</issn><issn>1879-2715</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2010</creationdate><recordtype>article</recordtype><recordid>eNp9kEFLw0AQhRdRsFb_gYfcPCXObDbZ5FKQolYoeFHwtmw2s-2WNKm7SaX_3pR4ljkM8_Heg3mM3SMkCJg_7pKjNsOwTzhAmSAmI7xgMyxkGXOJ2SWbAQgec5Bf1-wmhB0A8ByKGVus3GYbB2qD693R9adIt3W0PUNPoWuG3nVt1HQ_MbXkN6fofAaj-568aze37MrqJtDd356zz5fnj-UqXr-_vi2f1rERIPoYuUzzcTK0XOiSCy4LkNZqrGqTgzXSYl0i6kpWBRnIq6qwItVQVGChEumcPUy5B999DxR6tXfBUNPolrohKJmlUoDMYFSKSWl8F4Inqw7e7bU_KQR1bkvt1NSWOrelENUIR9tistH4xdGRV8E4ag3VzpPpVd25_wN-AT7YdZU</recordid><startdate>20100324</startdate><enddate>20100324</enddate><creator>Brongersma, Hidde H.</creator><creator>Grehl, Thomas</creator><creator>van Hal, Paul A.</creator><creator>Kuijpers, Niels C.W.</creator><creator>Mathijssen, Simon G.J.</creator><creator>Schofield, Emma R.</creator><creator>Smith, Richard A.P.</creator><creator>ter Veen, Hendrik R.J.</creator><general>Elsevier Ltd</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7U5</scope><scope>8FD</scope><scope>L7M</scope></search><sort><creationdate>20100324</creationdate><title>High-sensitivity and high-resolution low-energy ion scattering</title><author>Brongersma, Hidde H. ; Grehl, Thomas ; van Hal, Paul A. ; Kuijpers, Niels C.W. ; Mathijssen, Simon G.J. ; Schofield, Emma R. ; Smith, Richard A.P. ; ter Veen, Hendrik R.J.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c404t-1273636351f24a92427807ffa1bdc60fc7f1d911ab7b8ec06bb8f43a08b0f0b43</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2010</creationdate><topic>Carbon</topic><topic>Depth resolution</topic><topic>Diffusion barriers</topic><topic>Energy use</topic><topic>Filtering</topic><topic>Gold</topic><topic>High sensitivity</topic><topic>International Space Station</topic><topic>Ion scattering</topic><topic>LEIS</topic><topic>Low energy ion scattering</topic><topic>Mass resolution</topic><topic>Quantitative</topic><topic>Self-assembled monolayer</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Brongersma, Hidde H.</creatorcontrib><creatorcontrib>Grehl, Thomas</creatorcontrib><creatorcontrib>van Hal, Paul A.</creatorcontrib><creatorcontrib>Kuijpers, Niels C.W.</creatorcontrib><creatorcontrib>Mathijssen, Simon G.J.</creatorcontrib><creatorcontrib>Schofield, Emma R.</creatorcontrib><creatorcontrib>Smith, Richard A.P.</creatorcontrib><creatorcontrib>ter Veen, Hendrik R.J.</creatorcontrib><collection>CrossRef</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Vacuum</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Brongersma, Hidde H.</au><au>Grehl, Thomas</au><au>van Hal, Paul A.</au><au>Kuijpers, Niels C.W.</au><au>Mathijssen, Simon G.J.</au><au>Schofield, Emma R.</au><au>Smith, Richard A.P.</au><au>ter Veen, Hendrik R.J.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>High-sensitivity and high-resolution low-energy ion scattering</atitle><jtitle>Vacuum</jtitle><date>2010-03-24</date><risdate>2010</risdate><volume>84</volume><issue>8</issue><spage>1005</spage><epage>1007</epage><pages>1005-1007</pages><issn>0042-207X</issn><eissn>1879-2715</eissn><abstract>Low-Energy Ion Scattering (LEIS or ISS) is used to selectively analyze the atomic composition of the outer atomic layer of surfaces. In addition, the spectrum gives (non-destructively) the in-depth distribution. Using a double toroidal energy analyzer with parallel energy detection and time-of-flight filtering a high sensitivity and mass resolution of LEIS is achieved. This is demonstrated for a highly dispersed catalyst of Pt/Au on γ-alumina. The improved depth resolution is illustrated for self-assembled monolayers of alkanethiols (12–20 carbon atoms) on gold. Even for these low Z carbon atoms a clear shift of 8
eV/carbon atom is observed (using 1.5
keV
4He
+ ion scattering). This opens many new possibilities for studies of ultra-thin diffusion barriers, high-k dielectrics and biosensors.</abstract><pub>Elsevier Ltd</pub><doi>10.1016/j.vacuum.2009.11.016</doi><tpages>3</tpages></addata></record> |
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| ispartof | Vacuum, 2010-03, Vol.84 (8), p.1005-1007 |
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| language | eng |
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| source | Elsevier ScienceDirect Journals |
| subjects | Carbon Depth resolution Diffusion barriers Energy use Filtering Gold High sensitivity International Space Station Ion scattering LEIS Low energy ion scattering Mass resolution Quantitative Self-assembled monolayer |
| title | High-sensitivity and high-resolution low-energy ion scattering |
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