Fabrication of vertically positioned silicon on insulator photo-activated modulator
In this paper we present the fabrication process and the experimental proof of principle of a vertical Silicon On Insulator Photo Activated Modulator (vertical SOI-PAM). In this device the information is electronic while the modulation command is photonic. Since photon illumination generates free ch...
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| Veröffentlicht in: | Photonics and nanostructures 2009-12, Vol.7 (4), p.190-197 |
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| container_end_page | 197 |
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| container_issue | 4 |
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| container_title | Photonics and nanostructures |
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| creator | Abraham, Doron Zalevsky, Zeev Chelly, Avraham Shappir, Joseph |
| description | In this paper we present the fabrication process and the experimental proof of principle of a vertical Silicon On Insulator Photo Activated Modulator (vertical SOI-PAM). In this device the information is electronic while the modulation command is photonic. Since photon illumination generates free charges and current, the information channel should be isolated by combination of metal and oxide layers in order to avoid cross-talk. However photo-generated charges are capable of closing the channel by inducing changes in the space charge layers on both sides of the oxide. The device is a vertical structure of n-type silicon resistor on oxide insulator above a p-type silicon substrate. The photonic modulation command is applied by top illumination of a specially etched V-groove in the p-type substrate in the vicinity of the resistor. |
| doi_str_mv | 10.1016/j.photonics.2009.03.001 |
| format | Article |
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| source | Elsevier ScienceDirect Journals |
| subjects | Channels Devices Electro-optical devices Exact sciences and technology Fabrication Fundamental areas of phenomenology (including applications) Illumination Insulators Modulation Modulator Nanostructure Optical elements, devices, and systems Optical processors, correlators, and modulators Optics Oxides Photonic integrated circuits Photonics Physics Silicon photonics |
| title | Fabrication of vertically positioned silicon on insulator photo-activated modulator |
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