Fabrication of novel double microlens using two step soft lithography

A novel method to fabricate double layer microlens array is proposed where the second smaller microlens are imprinted on the first larger microlens by using soft lithography twice. Key step to implement this method is to imprint micron-size structures on convex surface using nano-imprinting technolo...

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Veröffentlicht in:Microelectronic engineering 2010-05, Vol.87 (5), p.1033-1036
Hauptverfasser: Kim, Han-Hyoung, O, Beom-Hoan, Lee, Seung-Gol, Park, Se-Geun
Format: Artikel
Sprache:eng
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