Microstructure and Properties of TiAlN/AlN Composite Film Deposited on Cam’s Profile by Ion Beam Sputtering Technique

The study reports a new surface formation technology during manufacturing process of parallel indexing cam mechanism, ion beam sputtering deposition, in which the operation temperature can be controlled below the limitation of phases exchanging or at room temperature. Phase exchanging deformation ca...

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Veröffentlicht in:	Key engineering materials 2010-01, Vol.443, p.465-468
Hauptverfasser:	Guo, Pei Quan, Wang, Shou Ren, Cui, Huan Yong
Format:	Artikel
Sprache:	eng
Schlagworte:	Adhesion Aluminum nitride Controlled atmospheres Deformation Deposition Diffraction Exchanging Indexing Ion beam sputtering Medium carbon steels Microhardness Microstructure Phases Quenching Scanning electron microscopy Slopes Steels Transmission electron microscopy X-rays
Online-Zugang:	Volltext
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