Improving the Dark Current Response of Monocrystalline N-Si Metal Semiconductor-Metal (MSM) Photodetector by Chemical and Thermal Treatment

We have demonstrated a method to improve the dark current response of monocrystalline N-Si metal-semiconductor-metal (MSM) photodetector. The combination of chemical and cryogenic treatment (77K) have been proven to successfully reducing dark current response in a silicon based MSM photodetector. Th...

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Veröffentlicht in:	PERFIK2009 2009-12, Vol.1250, p.149-152
Hauptverfasser:	Mohd Yusoff, M Z, Hashim, M R
Format:	Artikel
Sprache:	eng
Schlagworte:	Atomic force microscopy Cryogenic treatment Dark current Photodetectors Silicon Surface roughness Variability
Online-Zugang:	Volltext
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