Fabrication of microchannels using polycarbonates as sacrificial materials

The use of polycarbonates as thermally decomposable, sacrificial materials for the formation of microchannels is presented. Polycarbonates decompose in the temperature range of 200-300 degree C. Two polycarbonates, polyethylene carbonate and polypropylene carbonate, have been used to fabricate micro...

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Veröffentlicht in:	Journal of micromechanics and microengineering 2001-11, Vol.11 (6), p.733-737
Hauptverfasser:	Reed, Hollie A, White, Celesta E, Rao, Vikram, Allen, Sue Ann Bidstrup, Henderson, Clifford L, Kohl, Paul A
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Dielectric materials Electronics Exact sciences and technology Fluid dynamics Fundamental areas of phenomenology (including applications) Lithography, masks and pattern transfer Microelectronic fabrication (materials and surfaces technology) Other topics in fluid dynamics Physics Polycarbonates Polyethylenes Polypropylenes Pyrolysis Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Thermodynamic stability Thermogravimetric analysis
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