Self-aligned locally diffused emitter (SALDE) silicon solar cell

This paper presents, for the first time, a low-cost, high-throughput manufacturing approach for fabricating n-base dendritic web silicon solar cells with selectively doped emitters and self-aligned aluminum contacts using rapid thermal processing (RTP) and screen printing. The self-aligned locally d...

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Veröffentlicht in:	Solar energy materials and solar cells 1997-11, Vol.48 (1), p.159-165
Hauptverfasser:	Salami, Jalal, Shibata, Akio, Meier, Daniel, Kochka, Edgar, Yamanaka, Satoshi, Davis, Preston, Easoz, John, Abe, Toru, Kinoshita, Kazuo
Format:	Artikel
Sprache:	eng
Schlagworte:	Aluminum Annealing Locally diffused emitter Screen printing Semiconductor doping Silicon Solar cell Substrates
Online-Zugang:	Volltext
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