Optimization of thermal processing and device design for high-efficiency c-Si solar cells

To improve the cell performance of single-crystal silicon solar cells, the process conditions have been optimized by monitoring the bulk lifetime after each thermal step in the cell fabrication process. The emitter geometry, i.e., front and rear contact size and pitch were optimized, and the cells w...

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Veröffentlicht in:Solar energy materials and solar cells 1997-11, Vol.48 (1), p.137-143
Hauptverfasser: Warabisako, T., Uematsu, T., Muramatsu, S., Tsutsui, K., Ohtsuka, H., Nagata, Y., Sakamoto, M.
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container_end_page 143
container_issue 1
container_start_page 137
container_title Solar energy materials and solar cells
container_volume 48
creator Warabisako, T.
Uematsu, T.
Muramatsu, S.
Tsutsui, K.
Ohtsuka, H.
Nagata, Y.
Sakamoto, M.
description To improve the cell performance of single-crystal silicon solar cells, the process conditions have been optimized by monitoring the bulk lifetime after each thermal step in the cell fabrication process. The emitter geometry, i.e., front and rear contact size and pitch were optimized, and the cells were fabricated through a set of environmentally considered processes, especially for surface treatment, oxidation, diffusion, and electrode fabrication. Conversion efficiency of 22.3% in a 4 cm 2 cell, and 22.6% in a 1 cm 2 cell, was attained, respectively, with structural features of SiO 2 single-AR, “inverted-pyramid” fron texture, point-contact with line-emitter for front electrodes, and locally diffused BSF for rear contacts.
doi_str_mv 10.1016/S0927-0248(97)00085-8
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source Elsevier ScienceDirect Journals
subjects Carrier lifetime
Crystalline silicon
High efficiency
Optimization
Silica
Single crystals
Solar cells
Thermal process
title Optimization of thermal processing and device design for high-efficiency c-Si solar cells
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