Micro mixer with fast diffusion

A concept for micromixing of liquid is introduced, and its feasibility is demonstrated. The mixer allows fast mixing of small amounts of two liquids and is applicable to microliquid handling systems. The mixer has a channel for the liquid, an inlet port for the reagent, a 2.2-mm*2-mm*330- mu m mixin...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Miyake, R., Lammerink, T.S.J., Elwenspoek, M., Fluitman, J.H.J.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Detectors Etching Flow visualization Image motion analysis Laboratories Liquids Mechanical engineering Microelectromechanical devices Micropumps Optical device fabrication Optical microscopy Semiconducting silicon Semiconductor devices Ultraviolet sources
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