Recent advances in separation of roughness, waviness and form
Engineering surfaces are comprised of a range of spatial wavelengths. Filtering techniques are commonly adopted to separate the different wavelength components into well-defined bandwidths. Filtering is done prior to numerical characterization and it is also essential for extracting information need...
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Veröffentlicht in: | Precision engineering 2002-04, Vol.26 (2), p.222-235 |
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creator | Raja, J. Muralikrishnan, B. Fu, Shengyu |
description | Engineering surfaces are comprised of a range of spatial wavelengths. Filtering techniques are commonly adopted to separate the different wavelength components into well-defined bandwidths. Filtering is done prior to numerical characterization and it is also essential for extracting information needed to provide process feedback and establish functional correlation. This paper reviews commonly used filters in surface metrology like the 2RC, Gaussian and several new ones currently under research such as the spline, morphological, wavelets, regression filters and robust regression filters. The need for these new filters and examples illustrating the features of these filters are also presented. |
doi_str_mv | 10.1016/S0141-6359(02)00103-4 |
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fullrecord | <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_miscellaneous_746240846</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><els_id>S0141635902001034</els_id><sourcerecordid>27694800</sourcerecordid><originalsourceid>FETCH-LOGICAL-c452t-32f705071d4547890b351c21ced974c177353da4a3493ebf35cb1bddba930dd93</originalsourceid><addsrcrecordid>eNqFkElLxDAUx4MoOI5-BCEXN7D6sjXtQUQGNxgQXM4hTVKNdJox6Yz47e0s6E1P7x1-_7f8ENoncEaA5OdPQDjJcibKY6AnAARYxjfQgBSSZZRJuokGP8g22knpHQBkAXyALh6dcW2HtZ3r1riEfYuTm-qoOx9aHGocw-z1rXUpneJPPfeLDuvW4jrEyS7aqnWT3N66DtHLzfXz6C4bP9zej67GmeGCdhmjtQQBklguuCxKqJgghhLjbCm5IVIywazmmvGSuapmwlSksrbSJQNrSzZER6u50xg-Zi51auKTcU2jWxdmSUmeUw4Fz3vy8E-SyrzkBUAPihVoYkgpulpNo5_o-KUIqIVWtdSqFs4UULXUqnifO1gv0Mnopo69Np9-w6zoP10ecrniXO9l7l1UyXjXK7Y-OtMpG_w_m74BgIKKfA</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>27694800</pqid></control><display><type>article</type><title>Recent advances in separation of roughness, waviness and form</title><source>Access via ScienceDirect (Elsevier)</source><creator>Raja, J. ; Muralikrishnan, B. ; Fu, Shengyu</creator><creatorcontrib>Raja, J. ; Muralikrishnan, B. ; Fu, Shengyu</creatorcontrib><description>Engineering surfaces are comprised of a range of spatial wavelengths. Filtering techniques are commonly adopted to separate the different wavelength components into well-defined bandwidths. Filtering is done prior to numerical characterization and it is also essential for extracting information needed to provide process feedback and establish functional correlation. This paper reviews commonly used filters in surface metrology like the 2RC, Gaussian and several new ones currently under research such as the spline, morphological, wavelets, regression filters and robust regression filters. The need for these new filters and examples illustrating the features of these filters are also presented.</description><identifier>ISSN: 0141-6359</identifier><identifier>EISSN: 1873-2372</identifier><identifier>DOI: 10.1016/S0141-6359(02)00103-4</identifier><identifier>CODEN: PREGDL</identifier><language>eng</language><publisher>New York, NY: Elsevier Inc</publisher><subject>Applied sciences ; Bandwidth ; Correlation methods ; Digital filters ; Exact sciences and technology ; Filters ; Frequencies ; Industrial metrology. Testing ; Mechanical engineering. Machine design ; Morphology ; Process control ; Roughness ; Surface measurement ; Surface metrology ; Waviness</subject><ispartof>Precision engineering, 2002-04, Vol.26 (2), p.222-235</ispartof><rights>2002 Elsevier Science Inc.</rights><rights>2002 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c452t-32f705071d4547890b351c21ced974c177353da4a3493ebf35cb1bddba930dd93</citedby><cites>FETCH-LOGICAL-c452t-32f705071d4547890b351c21ced974c177353da4a3493ebf35cb1bddba930dd93</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://dx.doi.org/10.1016/S0141-6359(02)00103-4$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>314,780,784,3550,27924,27925,45995</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=13805046$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Raja, J.</creatorcontrib><creatorcontrib>Muralikrishnan, B.</creatorcontrib><creatorcontrib>Fu, Shengyu</creatorcontrib><title>Recent advances in separation of roughness, waviness and form</title><title>Precision engineering</title><description>Engineering surfaces are comprised of a range of spatial wavelengths. Filtering techniques are commonly adopted to separate the different wavelength components into well-defined bandwidths. Filtering is done prior to numerical characterization and it is also essential for extracting information needed to provide process feedback and establish functional correlation. This paper reviews commonly used filters in surface metrology like the 2RC, Gaussian and several new ones currently under research such as the spline, morphological, wavelets, regression filters and robust regression filters. The need for these new filters and examples illustrating the features of these filters are also presented.</description><subject>Applied sciences</subject><subject>Bandwidth</subject><subject>Correlation methods</subject><subject>Digital filters</subject><subject>Exact sciences and technology</subject><subject>Filters</subject><subject>Frequencies</subject><subject>Industrial metrology. Testing</subject><subject>Mechanical engineering. Machine design</subject><subject>Morphology</subject><subject>Process control</subject><subject>Roughness</subject><subject>Surface measurement</subject><subject>Surface metrology</subject><subject>Waviness</subject><issn>0141-6359</issn><issn>1873-2372</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2002</creationdate><recordtype>article</recordtype><recordid>eNqFkElLxDAUx4MoOI5-BCEXN7D6sjXtQUQGNxgQXM4hTVKNdJox6Yz47e0s6E1P7x1-_7f8ENoncEaA5OdPQDjJcibKY6AnAARYxjfQgBSSZZRJuokGP8g22knpHQBkAXyALh6dcW2HtZ3r1riEfYuTm-qoOx9aHGocw-z1rXUpneJPPfeLDuvW4jrEyS7aqnWT3N66DtHLzfXz6C4bP9zej67GmeGCdhmjtQQBklguuCxKqJgghhLjbCm5IVIywazmmvGSuapmwlSksrbSJQNrSzZER6u50xg-Zi51auKTcU2jWxdmSUmeUw4Fz3vy8E-SyrzkBUAPihVoYkgpulpNo5_o-KUIqIVWtdSqFs4UULXUqnifO1gv0Mnopo69Np9-w6zoP10ecrniXO9l7l1UyXjXK7Y-OtMpG_w_m74BgIKKfA</recordid><startdate>20020401</startdate><enddate>20020401</enddate><creator>Raja, J.</creator><creator>Muralikrishnan, B.</creator><creator>Fu, Shengyu</creator><general>Elsevier Inc</general><general>Elsevier Science</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7TB</scope><scope>8FD</scope><scope>FR3</scope><scope>7TC</scope></search><sort><creationdate>20020401</creationdate><title>Recent advances in separation of roughness, waviness and form</title><author>Raja, J. ; Muralikrishnan, B. ; Fu, Shengyu</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c452t-32f705071d4547890b351c21ced974c177353da4a3493ebf35cb1bddba930dd93</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2002</creationdate><topic>Applied sciences</topic><topic>Bandwidth</topic><topic>Correlation methods</topic><topic>Digital filters</topic><topic>Exact sciences and technology</topic><topic>Filters</topic><topic>Frequencies</topic><topic>Industrial metrology. Testing</topic><topic>Mechanical engineering. Machine design</topic><topic>Morphology</topic><topic>Process control</topic><topic>Roughness</topic><topic>Surface measurement</topic><topic>Surface metrology</topic><topic>Waviness</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Raja, J.</creatorcontrib><creatorcontrib>Muralikrishnan, B.</creatorcontrib><creatorcontrib>Fu, Shengyu</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Mechanical & Transportation Engineering Abstracts</collection><collection>Technology Research Database</collection><collection>Engineering Research Database</collection><collection>Mechanical Engineering Abstracts</collection><jtitle>Precision engineering</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Raja, J.</au><au>Muralikrishnan, B.</au><au>Fu, Shengyu</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Recent advances in separation of roughness, waviness and form</atitle><jtitle>Precision engineering</jtitle><date>2002-04-01</date><risdate>2002</risdate><volume>26</volume><issue>2</issue><spage>222</spage><epage>235</epage><pages>222-235</pages><issn>0141-6359</issn><eissn>1873-2372</eissn><coden>PREGDL</coden><abstract>Engineering surfaces are comprised of a range of spatial wavelengths. Filtering techniques are commonly adopted to separate the different wavelength components into well-defined bandwidths. Filtering is done prior to numerical characterization and it is also essential for extracting information needed to provide process feedback and establish functional correlation. This paper reviews commonly used filters in surface metrology like the 2RC, Gaussian and several new ones currently under research such as the spline, morphological, wavelets, regression filters and robust regression filters. The need for these new filters and examples illustrating the features of these filters are also presented.</abstract><cop>New York, NY</cop><pub>Elsevier Inc</pub><doi>10.1016/S0141-6359(02)00103-4</doi><tpages>14</tpages></addata></record> |
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subjects | Applied sciences Bandwidth Correlation methods Digital filters Exact sciences and technology Filters Frequencies Industrial metrology. Testing Mechanical engineering. Machine design Morphology Process control Roughness Surface measurement Surface metrology Waviness |
title | Recent advances in separation of roughness, waviness and form |
url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-30T02%3A49%3A30IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Recent%20advances%20in%20separation%20of%20roughness,%20waviness%20and%20form&rft.jtitle=Precision%20engineering&rft.au=Raja,%20J.&rft.date=2002-04-01&rft.volume=26&rft.issue=2&rft.spage=222&rft.epage=235&rft.pages=222-235&rft.issn=0141-6359&rft.eissn=1873-2372&rft.coden=PREGDL&rft_id=info:doi/10.1016/S0141-6359(02)00103-4&rft_dat=%3Cproquest_cross%3E27694800%3C/proquest_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=27694800&rft_id=info:pmid/&rft_els_id=S0141635902001034&rfr_iscdi=true |