Recent advances in separation of roughness, waviness and form

Engineering surfaces are comprised of a range of spatial wavelengths. Filtering techniques are commonly adopted to separate the different wavelength components into well-defined bandwidths. Filtering is done prior to numerical characterization and it is also essential for extracting information need...

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Veröffentlicht in:Precision engineering 2002-04, Vol.26 (2), p.222-235
Hauptverfasser: Raja, J., Muralikrishnan, B., Fu, Shengyu
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creator Raja, J.
Muralikrishnan, B.
Fu, Shengyu
description Engineering surfaces are comprised of a range of spatial wavelengths. Filtering techniques are commonly adopted to separate the different wavelength components into well-defined bandwidths. Filtering is done prior to numerical characterization and it is also essential for extracting information needed to provide process feedback and establish functional correlation. This paper reviews commonly used filters in surface metrology like the 2RC, Gaussian and several new ones currently under research such as the spline, morphological, wavelets, regression filters and robust regression filters. The need for these new filters and examples illustrating the features of these filters are also presented.
doi_str_mv 10.1016/S0141-6359(02)00103-4
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subjects Applied sciences
Bandwidth
Correlation methods
Digital filters
Exact sciences and technology
Filters
Frequencies
Industrial metrology. Testing
Mechanical engineering. Machine design
Morphology
Process control
Roughness
Surface measurement
Surface metrology
Waviness
title Recent advances in separation of roughness, waviness and form
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