Application of a microflown as a low-cost level sensor
In this paper we present a novel 'spirit level' sensor derived from a well known thermal flow sensor. The operation principle is based on the temperature difference of two identical heaters, caused by buoyancy of air. Heating as well as temperature sensing of the structures is carried out...
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| Veröffentlicht in: | Journal of micromechanics and microengineering 2000-06, Vol.10 (2), p.250-253 |
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| container_end_page | 253 |
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| container_issue | 2 |
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| container_title | Journal of micromechanics and microengineering |
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| creator | Honschoten, J van Baar, J van Bree, H E de Lammerink, T Krijnen, G Elwenspoek, M |
| description | In this paper we present a novel 'spirit level' sensor derived from a well known thermal flow sensor. The operation principle is based on the temperature difference of two identical heaters, caused by buoyancy of air. Heating as well as temperature sensing of the structures is carried out temperature-dependent platinum resistors. Due to its simplicity the sensor is easily fabricated in silicon micro-machining technology. The theory describing the sensor is presented. The first experiments, using dc signals only, show adequate sensitivity, although high-accuracy operation is hampered by thermal drift. |
| doi_str_mv | 10.1088/0960-1317/10/2/324 |
| format | Article |
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| ispartof | Journal of micromechanics and microengineering, 2000-06, Vol.10 (2), p.250-253 |
| issn | 0960-1317 1361-6439 |
| language | eng |
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| source | IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link |
| subjects | Air Buoyancy Heating Micromachining Platinum Resistors Scanning electron microscopy Semiconducting silicon Semiconductor device manufacture Temperature measurement |
| title | Application of a microflown as a low-cost level sensor |
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