Design and control of an air-bearing supported three degree-of-freedom fine positioner

The authors discuss design considerations and control issues of a fine-motion device which provides very high performance, precision, and speed (12-g acceleration, 0.2 mu m resolution). Coupled with a standard industrial robot and external sensing, improvements in precision up to two orders of magni...

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Bibliographische Detailangaben
Hauptverfasser:	Hammer, R., Hollis, R.L., An, C.H., Henriks, F.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Acceleration Air lubrication Automatic control Bearings (machine parts) Costs Electric motors Industrial robots Manufacturing automation Motion control Position control Robot sensing systems Robotic assembly Robotics and automation Sensors Service robots Testing
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