Optimization of a circular piezoelectric bimorph for a micropump driver

Piezoelectric bimorph actuation has been successfully used in numerous types of microdevices, most notably micropumps. However, even for the simple case of circular geometry, analytical treatments are severely limited. This study utilized the finite-element method to optimize the deflection of a cir...

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Veröffentlicht in:	Journal of micromechanics and microengineering 2000-09, Vol.10 (3), p.459-465
Hauptverfasser:	Morris, Christopher J, Forster, Fred K
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Elastic moduli Exact sciences and technology Fluidic devices Mechanical engineering. Machine design Optimization Piezoelectric devices Precision engineering, watch making
Online-Zugang:	Volltext
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