A novel linearly tunable MEMS variable capacitor

The linearly tunable microelectromechanical systems (MEMS) capacitor with 608 comb fingers changing the overlap area is developed. Unlike the conventional micromachined capacitor using the gap between the parallel plates, the proposed capacitor adopts the overlap area as the tuning parameter. In add...

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Veröffentlicht in:	Journal of micromechanics and microengineering 2002-01, Vol.12 (1), p.82-86
Hauptverfasser:	Seok, Seonho, Choi, Wonseo, Chun, Kukjin
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Bonding Capacitance Chemical mechanical polishing Electronics Exact sciences and technology Glass Microelectromechanical devices Microelectronic fabrication (materials and surfaces technology) Polysilicon Semiconducting silicon Semiconductor device structures Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Single crystals Substrates
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