Origin and evolution of sculptured thin films

Sculptured thin films (STFs) are a new class of engineered columnar thin films in which their shapes can resemble oblique matchsticks, chevrons, multiple zigzags, S’s, C’s, helices, and even superhelices. They can have densities as low as 10%–30% of the bulk material and can be made of virtually any...

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Veröffentlicht in:	Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films Surfaces, and Films, 2000-07, Vol.18 (4), p.1538-1545
Hauptverfasser:	Messier, Russell, Venugopal, Vijayakumar C., Sunal, Paul D.
Format:	Artikel
Sprache:	eng
Schlagworte:	Anisotropy Ion bombardment Mathematical models Morphology Thin films
Online-Zugang:	Volltext
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