Subharmonics analysis of nonlinear flexural vibrations of piezoelectrically actuated microcantilevers

Using the method of multiple scales, an extensive frequency response and subharmonic resonance analysis of the equations of motion governing the nonlinear flexural vibrations of piezoelectrically actuated microcantilevers is performed. Such comprehensive understanding of the nonlinear response and s...

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Veröffentlicht in:Nonlinear dynamics 2010-02, Vol.59 (3), p.397-409
Hauptverfasser: Mahmoodi, S. Nima, Jalili, Nader, Ahmadian, Mehdi
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Ahmadian, Mehdi
description Using the method of multiple scales, an extensive frequency response and subharmonic resonance analysis of the equations of motion governing the nonlinear flexural vibrations of piezoelectrically actuated microcantilevers is performed. Such comprehensive understanding of the nonlinear response and subharmonics analysis of these microcantilevers is, indeed, justified by the applications of piezoelectrically actuated microcantilevers that are increasingly becoming popular in many science and engineering areas including scanning force microscopy, biosensors, and microactuators. Along this line, the method of multiple scales is used to derive the 2× and 3× subharmonic resonances appearing in nonlinear flexural vibrations of a piezoelectrically actuated microcantilever. An experimental examination is performed in order to verify the analytical results. The analytical and experimental results yield the same system response for the fundamental frequency. In addition, the experimental results demonstrate the presence of subharmonic resonances that are supported by numerical simulations of the equations of motion. The experimental mode shapes of these subharmonic frequencies are also measured and compared with fundamental frequency.
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subjects Atomic force microscopy
Automotive Engineering
Biosensors
Classical Mechanics
Computer simulation
Control
Dynamical Systems
Engineering
Equations of motion
Frequency response
Mathematical analysis
Mechanical Engineering
Microactuators
Multiscale analysis
Nonlinear analysis
Nonlinear response
Original Paper
Resonant frequencies
Vibration
title Subharmonics analysis of nonlinear flexural vibrations of piezoelectrically actuated microcantilevers
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