Piezoresistive Effect in SiOC Ceramics for Integrated Pressure Sensors

Piezoresistivity was found in silicon oxycarbide (SiOC) ceramics synthesized using a polymer‐to‐ceramic transformation process. A commercial polysiloxane, namely poly(methylsilsesquioxane), was used as the starting material. The SiOC ceramic synthesized at 1400°C exhibits high piezoresistivity, lead...

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Veröffentlicht in:	Journal of the American Ceramic Society 2010-04, Vol.93 (4), p.920-924
Hauptverfasser:	Riedel, Ralf, Toma, Liviu, Janssen, Enrico, Nuffer, Jürgen, Melz, Tobias, Hanselka, Holger
Format:	Artikel
Sprache:	eng
Schlagworte:	Carbon Ceramics Materials science Percolation Piezoresistivity Polymers Pressure sensors Pyrolysis Silicon Silicon dioxide Spectrum analysis Transformations
Online-Zugang:	Volltext
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