Orthogonal-testing experimental on micro-ultrasonic-machining of microcrystalline-mica-ceramic

Micro-ultrasonic-machining (micro-USM) experiments were carried out on 530 km-thick microcrystalline-mica-ceramic (MCMC) slices with workpiece vibration and using silver tungsten alloy as tool materials. The experiments were designed by orthogonal-testing method considering five factors and two levels to investigate the influences of ultrasonic amplitude, tool feed rate, tool rotate speed, abrasive particle size and abrasive concentration on tool volume wear rate in the micro-USM of MCMC. Based on the experiments, a h80 km through hole was machined successfully on 530 km-thick MCMC slice with the optimized micro-USM parameters, and the taper of the hole is less than 0.5'.