The role of van der Waals forces in adhesion of micromachined surfaces

Interfacial adhesion and friction are important factors in determining the performance and reliability of microelectro- mechanical systems. We demonstrate that the adhesion of micromachined surfaces is in a regime not considered by standard rough surface adhesion models. At small roughness values, o...

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Veröffentlicht in:	Nature materials 2005-08, Vol.4 (8), p.629-634
Hauptverfasser:	DelRio, Frank W., de Boer, Maarten P., Knapp, James A., David Reedy, E., Clews, Peggy J., Dunn, Martin L.
Format:	Artikel
Sprache:	eng
Schlagworte:	Adhesion Biomaterials Chemistry and Materials Science Condensed Matter Physics Friction Laboratories Materials Science Microelectromechanical systems Nanotechnology Optical and Electronic Materials Oxidation
Online-Zugang:	Volltext
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