Simulation of resistive microwave resonator probe for high-pressure plasma diagnostics

A U-shape probe for microwave resonance in plasma was investigated in a range of high pressure (10-760 Torr). The electromagnetic field finite difference time domain-simulation of the probe revealed that, in the resistive resonance at high pressure, the resonant frequency fr approaches the dipole-an...

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Veröffentlicht in:	Plasma sources science & technology 2009-11, Vol.18 (4), p.045009-045009 (9)
Hauptverfasser:	Xu, Jinzhou, Nakamura, Keji, Zhang, Qi, Sugai, Hideo
Format:	Artikel
Sprache:	eng
Schlagworte:	Elementary processes in plasma Exact sciences and technology Physics Physics of gases, plasmas and electric discharges Physics of plasmas and electric discharges Plasma diagnostic techniques and instrumentation
Online-Zugang:	Volltext
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