Erasable electrostatic lithography for quantum components

Quantum electronic components-such as quantum antidots and one-dimensional channels-are usually defined from doped GaAs/AlGaAs heterostructures using electron-beam lithography or local oxidation by conductive atomic force microscopy. In both cases, lithography and measurement are performed in very d...

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Veröffentlicht in:	Nature 2003-08, Vol.424 (6950), p.751-754
Hauptverfasser:	Smith, Charles G, Crook, Rolf, Graham, Abi C, Farrer, Ian, Beere, Harvey E, Ritchie, David A
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Circuit properties Electric, optical and optoelectronic circuits Electronics Exact sciences and technology Fabrication Fabrication techniques lithography, pattern transfer Humanities and Social Sciences Integrated optics. Optical fibers and wave guides letter Lithography Low temperature multidisciplinary Optical and optoelectronic circuits Quantum theory Science Static electricity
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