Modeling multilayered MEMS-based micro-fluidic systems
The first set of simulations was carried out with channels having different inlet and outlet lengths, a constant diameter of 250 µm, and a constant input pressure of 5 GPa. Figure 5 shows the velocity profile of the fluid in a micro-channel u-bend with an inlet length of 200 µm and spacing of 350 µm...
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Veröffentlicht in: | JOM (1989) 2004-03, Vol.56 (3), p.57-61 |
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description | The first set of simulations was carried out with channels having different inlet and outlet lengths, a constant diameter of 250 µm, and a constant input pressure of 5 GPa. Figure 5 shows the velocity profile of the fluid in a micro-channel u-bend with an inlet length of 200 µm and spacing of 350 µm between the inlet and the outlet. It can be seen that the flow profile is unstable and the flow is not fully developed since the center does not have a high-velocity profile. |
doi_str_mv | 10.1007/s11837-004-0036-3 |
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subjects | Computer based modeling Design Electrodes Flow velocity Fluid dynamics Fluids Immunoassay Lab-on-a-chip Microelectromechanical systems Micromachining Pneumatics Sensors Simulation Tomography Valves |
title | Modeling multilayered MEMS-based micro-fluidic systems |
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