High-performance thin-film transistors using semiconductor nanowires and nanoribbons

Thin-film transistors (TFTs) are the fundamental building blocks for the rapidly growing field of macroelectronics 1 , 2 . The use of plastic substrates is also increasing in importance owing to their light weight, flexibility, shock resistance and low cost 3 , 4 . Current polycrystalline-Si TFT tec...

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Veröffentlicht in:Nature (London) 2003-09, Vol.425 (6955), p.274-278
Hauptverfasser: Duan, Xiangfeng, Niu, Chunming, Sahi, Vijendra, Chen, Jian, Parce, J. Wallace, Empedocles, Stephen, Goldman, Jay L.
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container_issue 6955
container_start_page 274
container_title Nature (London)
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creator Duan, Xiangfeng
Niu, Chunming
Sahi, Vijendra
Chen, Jian
Parce, J. Wallace
Empedocles, Stephen
Goldman, Jay L.
description Thin-film transistors (TFTs) are the fundamental building blocks for the rapidly growing field of macroelectronics 1 , 2 . The use of plastic substrates is also increasing in importance owing to their light weight, flexibility, shock resistance and low cost 3 , 4 . Current polycrystalline-Si TFT technology is difficult to implement on plastics because of the high process temperatures required 1 , 2 . Amorphous-Si and organic semiconductor 5 , 6 TFTs, which can be processed at lower temperatures, but are limited by poor carrier mobility. As a result, applications that require even modest computation, control or communication functions on plastics cannot be addressed by existing TFT technology. Alternative semiconductor materials 7 , 8 that could form TFTs with performance comparable to or better than polycrystalline or single-crystal Si, and which can be processed at low temperatures over large-area plastic substrates, should not only improve the existing technologies, but also enable new applications in flexible, wearable and disposable electronics. Here we report the fabrication of TFTs using oriented Si nanowire thin films or CdS nanoribbons as semiconducting channels. We show that high-performance TFTs can be produced on various substrates, including plastics, using a low-temperature assembly process. Our approach is general to a broad range of materials including high-mobility materials (such as InAs or InP).
doi_str_mv 10.1038/nature01996
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Alternative semiconductor materials 7 , 8 that could form TFTs with performance comparable to or better than polycrystalline or single-crystal Si, and which can be processed at low temperatures over large-area plastic substrates, should not only improve the existing technologies, but also enable new applications in flexible, wearable and disposable electronics. Here we report the fabrication of TFTs using oriented Si nanowire thin films or CdS nanoribbons as semiconducting channels. We show that high-performance TFTs can be produced on various substrates, including plastics, using a low-temperature assembly process. 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source SpringerLink Journals; Nature Journals Online
subjects Applied sciences
Electronics
Exact sciences and technology
Fabrication
Humanities and Social Sciences
letter
Low temperature
Microelectronic fabrication (materials and surfaces technology)
multidisciplinary
Nanotechnology
Plastics
Science
Science (multidisciplinary)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Semiconductors
Thin films
Transistors
title High-performance thin-film transistors using semiconductor nanowires and nanoribbons
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