Measurement of As, P, and S in the Waste Gases and Water Emitted from Semiconductor Processes by High-Temperature Hydrogen Reduction Gas Chromatography
A quick, sensitive, and accurate method, high-temperature hydrogen reduction gas chromatography (GC) (1,2), for measuring arsenic (As), phosphorus (P), and sulfur (S) in the waste gases and water emitted from semiconductor processes is proposed in this paper. A high-temperature hydrogen reduction sy...
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| Veröffentlicht in: | Journal of chromatographic science 2003-08, Vol.41 (7), p.367-370 |
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| creator | Ruimei, Wen Shouquan, Deng Yafeng, Zhang Wei, Fan |
| description | A quick, sensitive, and accurate method, high-temperature hydrogen reduction gas chromatography (GC) (1,2), for measuring arsenic (As), phosphorus (P), and sulfur (S) in the waste gases and water emitted from semiconductor processes is proposed in this paper. A high-temperature hydrogen reduction system that changes As, P, S, and their compounds into hydrides by atomic hydrogen has been designed. It is convenient to detect these elements in solid, liquid, and gaseous samples by high-temperature hydrogen reduction GC without pretreating samples. The lower detection limits of As, P, and S by this method are 0.01, 0.003, 0.02 mg/L, respectively, and the values of relative standard deviation are 6.2%, 8.6%, and 0.3%, respectively. Results determined by high-temperature hydrogen reduction GC are primarily accordant to those by conventional methods such as colorimetry and ion chromatography. The error statistics of this analysis method also show that high-temperature hydrogen reduction GC can be successfully used to determine trace As, P, and S in waste gases and wastewater emitted from semiconductor processes. |
| doi_str_mv | 10.1093/chromsci/41.7.367 |
| format | Article |
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A high-temperature hydrogen reduction system that changes As, P, S, and their compounds into hydrides by atomic hydrogen has been designed. It is convenient to detect these elements in solid, liquid, and gaseous samples by high-temperature hydrogen reduction GC without pretreating samples. The lower detection limits of As, P, and S by this method are 0.01, 0.003, 0.02 mg/L, respectively, and the values of relative standard deviation are 6.2%, 8.6%, and 0.3%, respectively. Results determined by high-temperature hydrogen reduction GC are primarily accordant to those by conventional methods such as colorimetry and ion chromatography. The error statistics of this analysis method also show that high-temperature hydrogen reduction GC can be successfully used to determine trace As, P, and S in waste gases and wastewater emitted from semiconductor processes.</description><identifier>ISSN: 0021-9665</identifier><identifier>EISSN: 1945-239X</identifier><identifier>DOI: 10.1093/chromsci/41.7.367</identifier><identifier>PMID: 12908953</identifier><identifier>CODEN: JCHSBZ</identifier><language>eng</language><publisher>Niles, IL: Oxford University Press</publisher><subject>Analysis methods ; Analytical chemistry ; Applied sciences ; Atmospheric pollution ; Chemistry ; Chromatographic methods and physical methods associated with chromatography ; Exact sciences and technology ; Gas chromatographic methods ; Industrial wastewaters ; Pollution ; Wastewaters ; Water treatment and pollution</subject><ispartof>Journal of chromatographic science, 2003-08, Vol.41 (7), p.367-370</ispartof><rights>2003</rights><rights>2003 INIST-CNRS</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c538t-bbcd77abb5b226c2560be74c1ec38a70eeee11fae99a6e200b1e979cb124c5773</citedby></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,780,784,1584,27924,27925</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=15049052$$DView record in Pascal Francis$$Hfree_for_read</backlink><backlink>$$Uhttps://www.ncbi.nlm.nih.gov/pubmed/12908953$$D View this record in MEDLINE/PubMed$$Hfree_for_read</backlink></links><search><creatorcontrib>Ruimei, Wen</creatorcontrib><creatorcontrib>Shouquan, Deng</creatorcontrib><creatorcontrib>Yafeng, Zhang</creatorcontrib><creatorcontrib>Wei, Fan</creatorcontrib><title>Measurement of As, P, and S in the Waste Gases and Water Emitted from Semiconductor Processes by High-Temperature Hydrogen Reduction Gas Chromatography</title><title>Journal of chromatographic science</title><addtitle>Journal of Chromatographic Science</addtitle><addtitle>Journal of Chromatographic Science</addtitle><description>A quick, sensitive, and accurate method, high-temperature hydrogen reduction gas chromatography (GC) (1,2), for measuring arsenic (As), phosphorus (P), and sulfur (S) in the waste gases and water emitted from semiconductor processes is proposed in this paper. A high-temperature hydrogen reduction system that changes As, P, S, and their compounds into hydrides by atomic hydrogen has been designed. It is convenient to detect these elements in solid, liquid, and gaseous samples by high-temperature hydrogen reduction GC without pretreating samples. The lower detection limits of As, P, and S by this method are 0.01, 0.003, 0.02 mg/L, respectively, and the values of relative standard deviation are 6.2%, 8.6%, and 0.3%, respectively. Results determined by high-temperature hydrogen reduction GC are primarily accordant to those by conventional methods such as colorimetry and ion chromatography. The error statistics of this analysis method also show that high-temperature hydrogen reduction GC can be successfully used to determine trace As, P, and S in waste gases and wastewater emitted from semiconductor processes.</description><subject>Analysis methods</subject><subject>Analytical chemistry</subject><subject>Applied sciences</subject><subject>Atmospheric pollution</subject><subject>Chemistry</subject><subject>Chromatographic methods and physical methods associated with chromatography</subject><subject>Exact sciences and technology</subject><subject>Gas chromatographic methods</subject><subject>Industrial wastewaters</subject><subject>Pollution</subject><subject>Wastewaters</subject><subject>Water treatment and pollution</subject><issn>0021-9665</issn><issn>1945-239X</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2003</creationdate><recordtype>article</recordtype><recordid>eNqNks1uEzEUhUcIREPhAdggb2CVSf0zHsfLKioNqIiqKUrFxrI9d5KBzHhqeyTyJLwuHhLosvXGsu53zr22T5a9JXhGsGRndutdG2xzVpCZmLFSPMsmRBY8p0zePc8mGFOSy7LkJ9mrEH6MRzLnL7MTQiWeS84m2e8voMPgoYUuIlej8zBF11OkuwqtUNOhuAW01iECutQBwt_CWkfw6KJtYoQK1WkGtIK2sa6rBhudR9feWQgjbvZo2Wy2-S20PXgdUye03FfebaBDNzDyjetGb7QYL6Oj23jdb_evsxe13gV4c9xPs28fL24Xy_zq6-WnxflVbjmbx9wYWwmhjeGG0tJSXmIDorAELJtrgSEtQmoNUuoSKMaGgBTSGkILy4Vgp9mHg2_v3f0AIaq2CRZ2O92BG4ISjJeMiPmjIJWCi_S6TwBZiQl73JFIQQXmI0gOoPUuBA-16n3Tar9XBKsxCOpfEFRBlFApCEnz7mg-mBaqB8Xx5xPw_gjoYPWu9rqzTXjgOC4k5jRx0wPnhv5JffMD3qTM_Pov0P6nSlXB1fLuu1rwlaB8faM-sz8pZ91U</recordid><startdate>20030801</startdate><enddate>20030801</enddate><creator>Ruimei, Wen</creator><creator>Shouquan, Deng</creator><creator>Yafeng, Zhang</creator><creator>Wei, Fan</creator><general>Oxford University Press</general><general>Preston Publications</general><scope>BSCLL</scope><scope>IQODW</scope><scope>NPM</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7QH</scope><scope>7TV</scope><scope>7UA</scope><scope>C1K</scope><scope>7TB</scope><scope>8FD</scope><scope>FR3</scope><scope>KR7</scope><scope>7X8</scope></search><sort><creationdate>20030801</creationdate><title>Measurement of As, P, and S in the Waste Gases and Water Emitted from Semiconductor Processes by High-Temperature Hydrogen Reduction Gas Chromatography</title><author>Ruimei, Wen ; Shouquan, Deng ; Yafeng, Zhang ; Wei, Fan</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c538t-bbcd77abb5b226c2560be74c1ec38a70eeee11fae99a6e200b1e979cb124c5773</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2003</creationdate><topic>Analysis methods</topic><topic>Analytical chemistry</topic><topic>Applied sciences</topic><topic>Atmospheric pollution</topic><topic>Chemistry</topic><topic>Chromatographic methods and physical methods associated with chromatography</topic><topic>Exact sciences and technology</topic><topic>Gas chromatographic methods</topic><topic>Industrial wastewaters</topic><topic>Pollution</topic><topic>Wastewaters</topic><topic>Water treatment and pollution</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Ruimei, Wen</creatorcontrib><creatorcontrib>Shouquan, Deng</creatorcontrib><creatorcontrib>Yafeng, Zhang</creatorcontrib><creatorcontrib>Wei, Fan</creatorcontrib><collection>Istex</collection><collection>Pascal-Francis</collection><collection>PubMed</collection><collection>CrossRef</collection><collection>Aqualine</collection><collection>Pollution Abstracts</collection><collection>Water Resources Abstracts</collection><collection>Environmental Sciences and Pollution Management</collection><collection>Mechanical & Transportation Engineering Abstracts</collection><collection>Technology Research Database</collection><collection>Engineering Research Database</collection><collection>Civil Engineering Abstracts</collection><collection>MEDLINE - Academic</collection><jtitle>Journal of chromatographic science</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Ruimei, Wen</au><au>Shouquan, Deng</au><au>Yafeng, Zhang</au><au>Wei, Fan</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Measurement of As, P, and S in the Waste Gases and Water Emitted from Semiconductor Processes by High-Temperature Hydrogen Reduction Gas Chromatography</atitle><jtitle>Journal of chromatographic science</jtitle><stitle>Journal of Chromatographic Science</stitle><addtitle>Journal of Chromatographic Science</addtitle><date>2003-08-01</date><risdate>2003</risdate><volume>41</volume><issue>7</issue><spage>367</spage><epage>370</epage><pages>367-370</pages><issn>0021-9665</issn><eissn>1945-239X</eissn><coden>JCHSBZ</coden><abstract>A quick, sensitive, and accurate method, high-temperature hydrogen reduction gas chromatography (GC) (1,2), for measuring arsenic (As), phosphorus (P), and sulfur (S) in the waste gases and water emitted from semiconductor processes is proposed in this paper. A high-temperature hydrogen reduction system that changes As, P, S, and their compounds into hydrides by atomic hydrogen has been designed. It is convenient to detect these elements in solid, liquid, and gaseous samples by high-temperature hydrogen reduction GC without pretreating samples. The lower detection limits of As, P, and S by this method are 0.01, 0.003, 0.02 mg/L, respectively, and the values of relative standard deviation are 6.2%, 8.6%, and 0.3%, respectively. Results determined by high-temperature hydrogen reduction GC are primarily accordant to those by conventional methods such as colorimetry and ion chromatography. The error statistics of this analysis method also show that high-temperature hydrogen reduction GC can be successfully used to determine trace As, P, and S in waste gases and wastewater emitted from semiconductor processes.</abstract><cop>Niles, IL</cop><pub>Oxford University Press</pub><pmid>12908953</pmid><doi>10.1093/chromsci/41.7.367</doi><tpages>4</tpages><oa>free_for_read</oa></addata></record> |
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| source | Oxford University Press Journals All Titles (1996-Current); EZB-FREE-00999 freely available EZB journals; Free Full-Text Journals in Chemistry |
| subjects | Analysis methods Analytical chemistry Applied sciences Atmospheric pollution Chemistry Chromatographic methods and physical methods associated with chromatography Exact sciences and technology Gas chromatographic methods Industrial wastewaters Pollution Wastewaters Water treatment and pollution |
| title | Measurement of As, P, and S in the Waste Gases and Water Emitted from Semiconductor Processes by High-Temperature Hydrogen Reduction Gas Chromatography |
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