Dispersion error in white-light linnik interferometers and its implications for evaluation procedures
White-light interferometry is a standard optical tool with which to measure profiles of discontinuous structures such as diffractive optical elements. But there is one outstanding technological problem: The interferometers have to be symmetric; i.e., the geometrical path lengths in glass have to be...
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| Veröffentlicht in: | Applied optics (2004) 2001-12, Vol.40 (34), p.6223-6228 |
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| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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