$Reconstruction of surface profiles from their diffraction spectra$

Reconstruction of surface profiles from their diffraction spectra

A possible method for reconstruction of two-dimensional, periodic surface profiles, from their diffraction spectra is outlined. Formulas for the distribution of diffracted power, based on physical optics, are summarized and computed by approximating real profiles by piecewise linear functions. The p...

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Veröffentlicht in:	Applied Optics 1972-07, Vol.11 (7), p.1579-1584
1. Verfasser:	Aas, J A
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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