Calibration method of the specific characteristic of an electronic system of a rotating-analyzer ellipsometer
In photometric ellipsometry the optical signal is transformed into an electrical signal by a photodetector, and it passes an electronic system to reduce the noise and to amplify the signal. But inherently it will induce a phase shift and an amplitude attenuation of the output signal. Such a specific...
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Veröffentlicht in: | Applied Optics 1997-04, Vol.36 (10), p.2178-2182 |
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Hauptverfasser: | , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | In photometric ellipsometry the optical signal is transformed into an electrical signal by a photodetector, and it passes an electronic system to reduce the noise and to amplify the signal. But inherently it will induce a phase shift and an amplitude attenuation of the output signal. Such a specific characteristic of an electronic system depends on the angular frequency of the signal and gives systematic errors to the results of the measurement of rotating-analyzer ellipsometry. We propose a modified method of measurement that enables us to calibrate the electronic system in the ellipsometric measurement configuration. |
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ISSN: | 1559-128X 0003-6935 1539-4522 |
DOI: | 10.1364/AO.36.002178 |