Measurement of surface features beyond the diffraction limit with an imaging ellipsometer

We report a sensitive surface and feature measurement technique that uses a novel imaging ellipsometer. Polarization signatures from unresolved subwavelength structures are utilized as a sensitive measure of linewidth. A focused beam rigorous coupled wave analysis method is developed to simulate the...

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Veröffentlicht in:	Optics letters 2002-05, Vol.27 (10), p.821-823
Hauptverfasser:	Zhan, Qiwen, Leger, James R
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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