Embossing technique for fabricating integrated optical components in hard inorganic waveguiding materials

We describe a novel embossing technique for fabricating integrated optical components in hard and resistant inorganic waveguiding materials of good optical quality. The desired structure is embossed into a dip-coated deformable gel film prepared from organometallic solutions. Subsequent heat treatme...

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Veröffentlicht in:	Optics letters 1983-10, Vol.8 (10), p.537-539
Hauptverfasser:	LUKOSZ, W, TIEFENTHALER, K
Format:	Artikel
Sprache:	eng
Schlagworte:	All optical circuits Applied sciences Circuit properties Electric, optical and optoelectronic circuits Electronics Exact sciences and technology Optical and optoelectronic circuits
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container_title	Optics letters
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creator	LUKOSZ, W TIEFENTHALER, K
description	We describe a novel embossing technique for fabricating integrated optical components in hard and resistant inorganic waveguiding materials of good optical quality. The desired structure is embossed into a dip-coated deformable gel film prepared from organometallic solutions. Subsequent heat treatment transforms it into inorganic hard oxide material. We have successfully fabricated surface-relief gratings with 1200 lines/mm on SiO(2)-TiO(2) waveguides (with refractive index n(F) approximately 1.8, thickness d(F) approximately 120 nm, and loss
doi_str_mv	10.1364/ol.8.000537
format	Article
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We propose to fabricate other integrated optical components, for example, channel waveguides, with this method.</description><identifier>ISSN: 0146-9592</identifier><identifier>EISSN: 1539-4794</identifier><identifier>DOI: 10.1364/ol.8.000537</identifier><identifier>PMID: 19718175</identifier><identifier>CODEN: OPLEDP</identifier><language>eng</language><publisher>Washington, DC: Optical Society of America</publisher><subject>All optical circuits ; Applied sciences ; Circuit properties ; Electric, optical and optoelectronic circuits ; Electronics ; Exact sciences and technology ; Optical and optoelectronic circuits</subject><ispartof>Optics letters, 1983-10, Vol.8 (10), p.537-539</ispartof><rights>1984 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c383t-310e2b98aa679d54e260c18d57d56891e514d0c3490f5568c04eefda7c1027b53</citedby><cites>FETCH-LOGICAL-c383t-310e2b98aa679d54e260c18d57d56891e514d0c3490f5568c04eefda7c1027b53</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,780,784,3256,27922,27923</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=9353074$$DView record in Pascal Francis$$Hfree_for_read</backlink><backlink>$$Uhttps://www.ncbi.nlm.nih.gov/pubmed/19718175$$D View this record in MEDLINE/PubMed$$Hfree_for_read</backlink></links><search><creatorcontrib>LUKOSZ, W</creatorcontrib><creatorcontrib>TIEFENTHALER, K</creatorcontrib><title>Embossing technique for fabricating integrated optical components in hard inorganic waveguiding materials</title><title>Optics letters</title><addtitle>Opt Lett</addtitle><description>We describe a novel embossing technique for fabricating integrated optical components in hard and resistant inorganic waveguiding materials of good optical quality. 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subjects	All optical circuits Applied sciences Circuit properties Electric, optical and optoelectronic circuits Electronics Exact sciences and technology Optical and optoelectronic circuits
title	Embossing technique for fabricating integrated optical components in hard inorganic waveguiding materials
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