Love waves in SiO(2) layers on STW-resonators based on LiTaO(3)
We present first studies of sensitivity increase of commercially available Murata SAF 380-type surface acoustic wave (SAW) devices by the excitation of Love waves. Sputtered SiO(2) is studied as wave-guiding layer. Excitation of Love waves on such devices is investigated both theoretically and exper...
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Veröffentlicht in: | Talanta (Oxford) 2004-01, Vol.62 (1), p.71-79 |
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Hauptverfasser: | , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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