Love waves in SiO(2) layers on STW-resonators based on LiTaO(3)

We present first studies of sensitivity increase of commercially available Murata SAF 380-type surface acoustic wave (SAW) devices by the excitation of Love waves. Sputtered SiO(2) is studied as wave-guiding layer. Excitation of Love waves on such devices is investigated both theoretically and exper...

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Veröffentlicht in:Talanta (Oxford) 2004-01, Vol.62 (1), p.71-79
Hauptverfasser: Barié, N, Wessa, T, Bruns, M, Rapp, M
Format: Artikel
Sprache:eng
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