$Monolithic integration of elliptic-symmetry diffractive optical element on silicon-based 45 degrees micro-reflector$

Monolithic integration of elliptic-symmetry diffractive optical element on silicon-based 45 degrees micro-reflector

A monolithically integrated micro-optical element consisting of a diffractive optical element (DOE) and a silicon-based 45 degrees micro-reflector is experimentally demonstrated to facilitate the optical alignment of non-coplanar fiber-to-fiber coupling. The slanted 45 degrees reflector with a depth...

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Veröffentlicht in:	Optics express 2009-11, Vol.17 (23), p.20938-20944
Hauptverfasser:	Lan, Hsiao-Chin, Hsiao, Hsu-Liang, Chang, Chia-Chi, Hsu, Chih-Hung, Wang, Chih-Ming, Wu, Mount-Learn
Format:	Artikel
Sprache:	eng
Schlagworte:	Equipment Design Lenses Light Optical Devices Optics and Photonics Physics - methods Refractometry - instrumentation Silicon
Online-Zugang:	Volltext
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