Observation of Knudsen effect with microcantilevers
The Knudsen effect is estimated theoretically and observed experimentally using a U-shaped silicon microcantilever. Though Knudsen forces are extremely small in most cases involving microcantilevers, there exist situations where these forces can be significant and may be important in atomic force mi...
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| Veröffentlicht in: | Ultramicroscopy 2003-10, Vol.97 (1), p.401-406 |
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| container_title | Ultramicroscopy |
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| creator | Passian, A. Warmack, R.J. Wig, A. Farahi, R.H. Meriaudeau, F. Ferrell, T.L. Thundat, T. |
| description | The Knudsen effect is estimated theoretically and observed experimentally using a U-shaped silicon microcantilever. Though Knudsen forces are extremely small in most cases involving microcantilevers, there exist situations where these forces can be significant and may be important in atomic force microscopy and in microelectromechanical systems (MEMS). The criteria for the presence of Knudsen forces are outlined and an analytical expression in the form of a linear function of the pressure is given for the force in the free molecular regime. The experimental results display peaks in the transitional regime while varying linearly in the molecular regime. |
| doi_str_mv | 10.1016/S0304-3991(03)00067-6 |
| format | Article |
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| subjects | Atomic force microscopes Atomic force microscopy Exact sciences and technology Fluid dynamics Force measurement Free molecular flow Free molecular flows Fundamental areas of phenomenology (including applications) Instruments, apparatus, components and techniques common to several branches of physics and astronomy Knudsen force Mechanical instruments, equipment and techniques Microcantilever sensors Micromechanical devices and systems Physics Rarefied gas Rarefied gas dynamics Scanning probe microscopes, components and techniques Vacuum apparatus and techniques Vacuum chambers, auxiliary apparatus and materials |
| title | Observation of Knudsen effect with microcantilevers |
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