Micro knife-edge optical measurement device in a silicon-on-insulator substrate

The knife-edge method is a commonly used technique to characterize the optical profiles of laser beams or focused spots. In this paper, we present a micro knife-edge scanner fabricated in a silicon-on-insulator substrate using the micro-electromechanical-system technology. A photo detector can be fa...

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Veröffentlicht in:	Optics express 2007-05, Vol.15 (10), p.6367-6373
Hauptverfasser:	Chiu, Yi, Pan, Jiun-Hung
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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