Ion assisted deposition of thermally evaporated Ag and Al films

Optical, electrical, and microstructural effects of Ar-ion bombardment and Ar incorporation on thermally evaporated Ag and Al thin films are investigated. The results show that as the momentum supplied to the growing films by the bombarding ions per arriving metal atom increases, the refractive inde...

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Veröffentlicht in:	Appl. Opt.; (United States) 1989-07, Vol.28 (14), p.2769-2778
Hauptverfasser:	CHANG KWON HWANGBO, LINGG, L. J, LEHAN, J. P, MACLEOD, H. A, MAKOUS, J. L, SANG YEOL KIM
Format:	Artikel
Sprache:	eng
Schlagworte:	656003 - Condensed Matter Physics- Interactions between Beams & Condensed Matter- (1987-) ALUMINIUM Analysing. Testing. Standards Applied sciences ARGON IONS BEAMS CHARGED PARTICLES COATINGS COLLISIONS CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY Condensed matter: electronic structure, electrical, magnetic, and optical properties CORRELATIONS Cross-disciplinary physics: materials science rheology CRYSTAL STRUCTURE DEPOSITION ELECTRICAL PROPERTIES ELEMENTS Exact sciences and technology ION BEAMS ION COLLISIONS IONS Materials science Measurement of properties and materials state METALS Metals, semimetals and alloys Metals. Metallurgy MICROSTRUCTURE Nondestructive testing OPTICAL PROPERTIES Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation Optical properties of specific thin films PHYSICAL PROPERTIES Physics SILVER Specific materials TRANSITION ELEMENTS
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