Spatial-mode control of vertical-cavity lasers with micromirrors fabricated and replicated in semiconductor materials
Micromirrors were fabricated in gallium phosphide by mass transport to provide spatial-mode control of vertical-cavity surface-emitting lasers (VCSEL's). The concave mirrors were used in an external-cavity configuration to provide spatial filtering in the far field. Single-mode cw lasing was de...
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Veröffentlicht in: | Applied Optics 1999-05, Vol.38 (14), p.3030-3038 |
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container_title | Applied Optics |
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creator | Nikolajeff, F Ballen, T A Leger, J R Gopinath, A Lee, T C Williams, R C |
description | Micromirrors were fabricated in gallium phosphide by mass transport to provide spatial-mode control of vertical-cavity surface-emitting lasers (VCSEL's). The concave mirrors were used in an external-cavity configuration to provide spatial filtering in the far field. Single-mode cw lasing was demonstrated in 15-microm-diameter VCSEL's with currents as high as 6 times threshold. The fabrication process was extended to micromirrors in gallium arsenide by use of a replication and dry-etch transfer process. |
doi_str_mv | 10.1364/AO.38.003030 |
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title | Spatial-mode control of vertical-cavity lasers with micromirrors fabricated and replicated in semiconductor materials |
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