$Thin-film thickness profile and its refractive index measurements by dispersive white-light interferometry$

Thin-film thickness profile and its refractive index measurements by dispersive white-light interferometry

As an extension of the authors' previous report of Ref 1, we describe an improved version of dispersive white-light interferometry that enables us to measure the tomographical thickness profile of a thin-film layer through Fourier-transform analysis of spectrally-resolved interference signals....

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Veröffentlicht in:	Optics express 2006-11, Vol.14 (24), p.11885-11891
Hauptverfasser:	Ghim, Young-Sik, Kim, Seung-Woo
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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