Shape-controlled, high fill-factor microlens arrays fabricated by a 3D diffuser lithography and plastic replication method

This paper describes a simple and effective method to fabricate a plastic microlens array with controllable shape and high fill-factor, which utilizes the conventional lithography and plastic replication. The only difference from conventional lithography is the insertion of a diffuser that randomize...

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Veröffentlicht in:Optics express 2004-12, Vol.12 (25), p.6366-6371
Hauptverfasser: Chang, Sung-Il, Yoon, Jun-Bo
Format: Artikel
Sprache:eng
Online-Zugang:Volltext
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