Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching

Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching

We present novel results obtained in the fabrication of high-aspect ratio micro-fluidic microstructures chemically etched from fused silica substrates locally exposed to femtosecond laser radiation. A volume sampling method to generate three-dimensional patterns is proposed and a systematic SEM-base...

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Veröffentlicht in:Optics express 2004-05, Vol.12 (10), p.2120-2129
Hauptverfasser: Bellouard, Yves, Said, Ali, Dugan, Mark, Bado, Philippe
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container_issue 10
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container_title Optics express
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creator Bellouard, Yves
Said, Ali
Dugan, Mark
Bado, Philippe
description We present novel results obtained in the fabrication of high-aspect ratio micro-fluidic microstructures chemically etched from fused silica substrates locally exposed to femtosecond laser radiation. A volume sampling method to generate three-dimensional patterns is proposed and a systematic SEM-based analysis of the microstructure is presented. The results obtained gives new insights toward a better understanding of the femtosecond laser interaction with fused silica glass (a-SiO(2)).
doi_str_mv 10.1364/opex.12.002120
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title Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching
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