Synthesis and characterization of volatile, fluorine-free beta-ketoiminate lanthanide MOCVD precursors and their implementation in low-temperature growth of epitaxial CeO(2) buffer layers for superconducting electronics

A new class of volatile, low-melting, fluorine-free lanthanide metal-organic chemical vapor deposition (MOCVD) precursors has been developed. The neutral, monomeric Ce, Nd, Gd, and Er complexes are coordinatively saturated by a versatile, multidentate ether-functionalized beta-ketoiminato ligand ser...

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Veröffentlicht in:	Inorganic chemistry 2002-10, Vol.41 (20), p.5005-5023
Hauptverfasser:	Edleman, Nikki L, Wang, Anchuan, Belot, John A, Metz, Andrew W, Babcock, Jason R, Kawaoka, Amber M, Ni, Jun, Metz, Matthew V, Flaschenriem, Christine J, Stern, Charlotte L, Liable-Sands, Louise M, Rheingold, Arnold L, Markworth, Paul R, Chang, Robert P H, Chudzik, Michael P, Kannewurf, Carl R, Marks, Tobin J
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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