Simultaneous measurement of surface geometry and material distribution by focusing ellipsotopometry
A new method for total surface measurement based on reflection ellipsometry is presented. By scanning the surface of the target under test with a focused laser beam, one can measure the surface topography and its material distribution simultaneously with high lateral resolution. Target topography is...
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| Veröffentlicht in: | Applied Optics 2002-08, Vol.41 (22), p.4526-4535 |
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| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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