Holistic characterization of complex transmittances generated by infrared sub-wavelength gratings

We present a characterization technique of wide-area subwavelength structures. The optical bench is based on lateral shearing interferometry, which allows an accurate complex transmittance (phase and amplitude) measurement. The experimental validation is made in the long-wavelength infrared domain;...

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Veröffentlicht in:	Optics express 2008-05, Vol.16 (10), p.7060-7070
Hauptverfasser:	Toulon, Bruno, Vincent, Grégory, Haidar, Riad, Guérineau, Nicolas, Collin, Stéphane, Pelouard, Jean-Luc, Primot, Jérôme
Format:	Artikel
Sprache:	eng
Schlagworte:	Calibration Equipment Design Gold Interferometry - methods Light Models, Statistical Models, Theoretical Nanostructures - chemistry Optics and Photonics Spectrophotometry, Infrared - methods Spectroscopy, Fourier Transform Infrared - methods
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