Consequences of positive ions upon imaging in low vacuum scanning electron microscopy

Summary The effects caused by an excess quantity of ionized gas molecules within the low vacuum, variable pressure and environmental scanning electron microscope (ESEM) are described with reference to mechanisms by which they can influence imaging conditions. These effects can include specimen charg...

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Veröffentlicht in:	Journal of microscopy (Oxford) 2002-01, Vol.205 (1), p.96-105
Hauptverfasser:	Craven, J. P., Baker, F. S., Thiel, B. L., Donald, A. M.
Format:	Artikel
Sprache:	eng
Schlagworte:	Electron–ion recombination ESEM low vacuum SEM positive ions, space charge SEM
Online-Zugang:	Volltext
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