Lateral scanning confocal microscopy for the determination of in-plane displacements of microelectromechanical systems devices

A method named lateral scanning confocal microscopy (LtSCM) is proposed with the aim of determining the in-plane displacement of microstructures, especially of those moving components within microelectromechanical systems (MEMS) actuators and sensors, which feature high aspect ratio and limited geom...

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Veröffentlicht in:	Optics letters 2007-06, Vol.32 (12), p.1743-1745
Hauptverfasser:	ZHI LI, HERRMANN, Konrad, POHLENZ, Frank
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Conventional optical microscopes Electronics Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Measurements common to several branches of physics and astronomy Metrology, measurements and laboratory procedures Micro- and nanoelectromechanical devices (mems/nems) Optical instruments, equipment and techniques Physics Scanning probe microscopes, components and techniques Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Spatial dimensions (e.g.: position, lengths, volume, angles, displacements, including nanometer-scale displacements)
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