Water-Soluble Sacrificial Layers for Surface Micromachining

This manuscript describes the use of water‐soluble polymers for use as sacrificial layers in surface micromachining. Water‐soluble polymers have two attractive characteristics for this application: 1) They can be deposited conveniently by spin‐coating, and the solvent removed at a low temperature (9...

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Veröffentlicht in:	Small (Weinheim an der Bergstrasse, Germany) Germany), 2005-07, Vol.1 (7), p.730-736
Hauptverfasser:	Linder, Vincent, Gates, Byron D., Ryan, Declan, Parviz, Babak A., Whitesides, George M.
Format:	Artikel
Sprache:	eng
Schlagworte:	Acrylic Resins - chemistry Calcium - chemistry Chemistry, Organic - methods Dextrans - chemistry Electrochemistry - instrumentation Electrochemistry - methods Ions microelectromechanical systems Nanotechnology - instrumentation Nanotechnology - methods Nickel - chemistry Oxides - chemistry polymers Polymers - chemistry sacrificial layers Solubility Solvents - chemistry spin coating surface micromachining Surface Properties Temperature Water - chemistry
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