Synthesis of Silicon Nanowires and Nanofin Arrays Using Interference Lithography and Catalytic Etching

We report results on the synthesis of silicon nanostructures that were fabricated using a combination of interference lithography and catalytic etching. With this technique, we were able to create nanostructures that are perfectly periodic over very large areas (1 cm2 or more), where the cross-secti...

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Veröffentlicht in:	Nano letters 2008-11, Vol.8 (11), p.3799-3802
Hauptverfasser:	Choi, W. K, Liew, T. H, Dawood, M. K, Smith, Henry I, Thompson, C. V, Hong, M. H
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Exact sciences and technology Low-dimensional structures (superlattices, quantum well structures, multilayers): structure, and nonelectronic properties Materials science Methods of nanofabrication Nanocrystalline materials Nanolithography Nanoscale materials and structures: fabrication and characterization Physics Quantum wires Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties)
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