Dichroic rugate filters based on birefringent porous silicon
Rugate filters made of anisotropically nanostructured birefringent silicon have been fabricated and studied by polarization-resolved transmission measurements. Electrochemical etching of a (110) oriented Si wafer results in porous silicon layers which exhibit a strong in-plane birefringence. We demo...
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| Veröffentlicht in: | Optics express 2008-09, Vol.16 (20), p.15531-15539 |
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| container_title | Optics express |
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| creator | Ishikura, Nobuyuki Fujii, Minoru Nishida, Kohei Hayashi, Shinji Diener, Joachim |
| description | Rugate filters made of anisotropically nanostructured birefringent silicon have been fabricated and studied by polarization-resolved transmission measurements. Electrochemical etching of a (110) oriented Si wafer results in porous silicon layers which exhibit a strong in-plane birefringence. We demonstrate that a sinusoidal refractive index variation of birefringent porous silicon combined with index-matching layers and apodization results in a dichroic rugate filter having a stop-band dependent on the polarization direction of the incident light without higher-order harmonics and sidelobes. We also demonstrate that the combination of different dichroic rugate filters allow us to realize filters with more complex properties in a single preparation step. |
| doi_str_mv | 10.1364/oe.16.015531 |
| format | Article |
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| subjects | Anisotropy Computers Electrochemistry - methods Equipment Design Filtration - instrumentation Light Microscopy, Electron, Transmission Models, Statistical Optics and Photonics Silicon - chemistry |
| title | Dichroic rugate filters based on birefringent porous silicon |
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