Local anodic oxidation by AFM tip developed for novel semiconductor nanodevices

The local anodic oxidation (LAO) by the tip of atomic force microscope (AFM) is used for fabrication of nanometer-scaled structures and devices. We study the technology of LAO applied to semiconductor heterostructures, theoretically and experimentally as well. The goal is to improve the LAO process...

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Veröffentlicht in:	Ultramicroscopy 2008-09, Vol.108 (10), p.1021-1024
Hauptverfasser:	Cambel, Vladimír, Martaus, Jozef, Šoltýs, Ján, Kúdela, Robert, Gregušová, Dagmar
Format:	Artikel
Sprache:	eng
Schlagworte:	Atomic force microscope Computer simulations Local anodic oxidation Mesoscopic and nanoscale systems Nanooxidation
Online-Zugang:	Volltext
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